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Contact scanning probes have higher accuracy than non-contact probes in industrial applications. But changes of the measured surface and adjustment of velocity and acceleration may cause random measurement deviations, which are mainly determined by dynamic characteristics of the probe system. To realize the prediction of measurement deviations related to scanning parameters, this paper proposes a simpler detection method of dynamic performance. In this article, the dynamic response characteristics of the probe to diverse external stimuli are studied theoretically and experimentally on the basis of the original probe design. Under different scanning variables including the amplitude, spacing and shape of the surface, velocity and acceleration, the integration of the second-order vibration model and external excitation forms the theoretical basis for quantitative analysis of the system response, and numerical simulation and three sets of experiments are designed to effectively verify the deviation distribution of the system response caused by different scanning parameters in the time and frequency domains.

Scanning Strategy of Deviation-Boundary Prediction Based on Probe Dynamics