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The piezoelectric micro-positioning platform(PMP) has advantages in high displacement resolution and fast response, however, the serious hysteresis nonlinearity in the PMP restricts its positioning accuracy. This paper presents a discretization of Krasnosel&#x2019;skii-Pokrovskii model to describe the hysteresis nonlinearity of the PMP. Then, the density function is identified online by the adaptive linear neural network. To compensate the intrinsic hysteresis nonlinearity in the PMP, a feedforward compensation control method is implemented by an innovative iterative learning control algorithm. Moreover, a hybrid control method based on iterative learning and fractional order PID control is proposed to further improve the control accuracy. A series of comparative experiments are carried out to validate the feasibility and effectiveness of the proposed control method.

Iterative Learning and Fractional Order PID Hybrid Control for a Piezoelectric Micro-Positioning Platform