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A piezoelectric inertial actuator for magnetorheological fluid (MRF) control using permanent magnet is proposed in this paper. The stable linear motion of the actuator with high controllability is obtained by integrating the piezoelectric vibrator and MRF control structures. The magnetic field distribution between yoke teeth is analyzed by finite element analysis. Laser displacement measuring and scanning vibrometer systems are built to test the output performance of the proposed actuator. The experimental results show that the actuator with MRF control structure has good controllability, with a minimum step displacement of 0.0204 <inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> and maximum moving speed and a load of 31.15 <inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula>/s and 800 g, respectively. The experiments confirm that the MRF control structure can be used to control the piezoelectric actuator with high controllability and increase the stability of output displacement.

Design and Experimental Performance of a Novel Piezoelectric Inertial Actuator for Magnetorheological Fluid Control Using Permanent Magnet