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Microstructure functional surface is widely used in an optical system because of its special micro-topological structure and particular physical properties. This paper presents a context-aware autonomously controlling method of micro-dots punching machine tool via establishing the digital twin-driven cyber-physical system. Key enabling techniques on twinning of cyberspace and physical equipment are discussed. A dynamic adjustment model of piezoelectric ceramics for micro-dots punching is presented based on the high-precision online detection and control system. A novel staggered punching approach is proposed for improving the punching speed. A joint optimization model is proposed for coordinating micro-punching system and staggered process. Context-aware autonomous adjusting of the system with errors analysis and compensations in the punching process is realized. Finally, a positioning accuracy of    $2~mu text{m}$    and a high punching speed of 20–65 dots/s are achieved. This paper is expected to provide a new approach for incorporating smart-enabling techniques in the ultra-precision machining of microstructure arrays.

Digital Twin-Driven Cyber-Physical System for Autonomously Controlling of Micro Punching System