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A majority of luminance measurement systems are currently focused on measuring the total luminance of light-emitting diodes (LEDs). It has largely limit its application on micro-LEDs, which require capturing the microscopic surface luminance. In order to study the microscopic characteristics of micro-LED displays, in this paper we propose a practical method that can accurately measure the luminance of a whole micro-LED array and even the surface luminance distribution of any single micro-led chip on the array. The essentials of this method are a high-precision complementary metal oxide semiconductor camera and a self-made data processing algorithm. Results show that the maximum error of the luminance measurement is less than 8&#x0025;, which can prove the accuracy of the method. The metrical wavelength range and the accuracy of system can be dynamically set according to the camera and microscope. Endowed with ultrahigh dynamic ranges, this system proves its competency for evaluating the spatially resolved distribution of luminance for high brightness micro-LEDs.

Research on a Camera-Based Microscopic Imaging System to Inspect the Surface Luminance of the Micro-LED Array