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The effect of the patterning process on the nonlinearity of the microwave surface resistance R/sub s/ of YBCO thin films is investigated in this paper. With the use of a sapphire dielectric resonator and a stripline resonator, the microwave R/sub s/ of YBCO thin films was measured before and after the patterning process, as a function of temperature and the RF peak magnetic field in the film. The microwave loss was also modeled, assuming a J/sub rf//sup 2/ dependence of Z/sub s/(J/sub rf/) on current density J/sub rf/. Experimental and modeled results show that the patterning has no observable effect on the microwave residual R/sub s/ or on the power dependence of R/sub s/.

Comparison of power dependence of microwave surface resistance of unpatterned and patterned YBCO thin film