Thermal stability of metastable fcc-(Ti,Al)N in atoms that should compensate the local lattice nanoscaled TiN/(Ti,Al)N/AlN multilayers strains caused by the fluctuations of the [Ti]/([Ti]+[Al]) ratio | Zendy

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Thermal stability of metastable fcc-(Ti,Al)N in atoms that should compensate the local lattice nanoscaled TiN/(Ti,Al)N/AlN multilayers strains caused by the fluctuations of the [Ti]/([Ti]+[Al]) ratio

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