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Experiments Fig.1 shows the measured GaAs 200 diffracted rocking curves h I , and transmitted ones t I in the Laue case [1] when X-ray energy is just below Ga K-edge (a), and 453.7eV below As K-edge (b). In (a), the rocking curves of h I and t I are anti-phase to each other [2], while in (b), the maximum intensities due to anomalous transmission for h I and t I appear at the same angle and fringes in their tails are in-phase to each other. Figs. 2(a) and (b) show the topographies recorded at the X-ray energies in Figs. 1(a) and (b), respectively. The interference fringes are clearly observed in the upper side of defect α (see arrow in (a)). The area around the defect α shows a dark band in (b). Fig.3 shows a scanning electron microscopy (SEM) image of the same region as in Fig. 2 observed from the incident surface of X-ray. Along the defect band observed in the topographies in Fig. 2, many ditches are observed running in the [110] direction.

Observation of topography using resonant scattering and its SEM images