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X-ray reflectivity is sensitive to slight structural changes along the depth of layered materials in the order of sub-nanometers or even smaller. This property is extremely promising for the observation of buried layers and interfaces of multilayered thin films. So far, the method looks at quite wide area (mm~cm) and requires typically 20min~1h for one measurement. Here we report the instrumentation for upgrading the technique to give it a much higher spatial resolution with very quick measurement. The experiment has been done with high-energy white synchrotron beam ranging up to 100 keV, at BL28B2, SPring-8. Parallel small beam of 17micron(H) x 5.5micron(V) has been formed by several pairs of thick blade of tungsten. The data have been taken by a silicon drift detector as X-ray reflection spectra. One can analyze inhomogeneous layered thin films with around 20 micron resolution, and even scanning has become possible. Figure shows the results of the line scan of a patterned sample which has Cu, Cr and Au layer on the same substrate. Further experimental details and results will be presented. References [1] K. Sakurai et al., J. Phys.: Conf Ser 83, 012001 (2007).

Time-resolved X-ray reflectivity investigation of lysozyme adsorption at the air–water interface