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In the paper the methodical development and first instrumental realization of computed laminography with synchrotron radiation is described. Synchrotron radiation computed Laminography, in the following called SRCL, combines tomosynthesis principles with the specific advantages of synchrotron radiation, such as high brilliance (allowing contrast improvement by working with monochromatic radiation), high partial coherence (enabling to use phase contrast enhancement due to Fresnel diffraction), high spatial resolutions with electronic detector systems with fast read-out and high dynamic range. CT consists in the acquisition of a series of projection radiographs for different rotation angles around the tomographic axis, which is set perpendicular to the transmitted beam direction. By applying suitable reconstruction algorithms, a 3d image of the sample volume can be reconstructed, providing that the entire sample width was imaged. Since the field of view of digital 2D detectors is limited CT has to accept a compromise between spatial resolution and maximum lateral object width a limitation, which often hinders applications of CT for non-destructive testing of micro systems, e.g. the inspection of the bump bonds of flip-chip bonded micro devices. Contrary to computed tomography, for flat objects the resolution realizable by SRCL does not depend on theobject size. By some simple modification of the scanning geometry and adaptation of tomosynthesis reconstruction algorithms, SRCL enables non-destructively imaging of the 3D-structure of flat, laterally extended objects such as devices of micro system technology. In the talk we discuss the novel instrumental set-up, based on a new concept also compared to laboratory tomosynthesis set-ups. By a series of first experimental examples we show the feasibility of the method for imaging with both, white and monochromatic radiation and high spatial resolution down to submicron scale. The comparison to phantom samples demonstrates the methodical and instrumental feasibilities; the selected examples illustrate the method’s potential for non-destructive testing and quality assurance. m26.p01

Synchrotron-radiation computed laminography – a new method for the three-dimensional imaging of flat objects