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Calculations show that 10 keV helium and carbon ions, injected midway between two identical 1 TW-power crossed laser beams of radial polarization, can be accelerated in vacuum to energies of utility in ion lithography. As examples, identical laser beams, crossed at 10° and focused to waist radii of 7.42  μm, accelerate He^{2+} and C^{6+} ions to average kinetic energies near 75 and 165 keV over distances averaging less than 7 and 6 mm, respectively. The spread in kinetic energy in both cases is less than 1% and the particle average angular deflection is less than 7 mrad. More energy-demanding industrial applications require higher-power laser beams for their direct ion laser acceleration

Direct acceleration of ions to low and medium energies by a crossed-laser-beam configuration