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Experimental spectroscopic studies are presented, in a 5.5--25.5nmextreme-ultraviolet (EUV) wavelength range, of the light emitted from plasmaproduced by the irradiation of tin microdroplets by 5-ns-pulsed,2-$\mu$m-wavelength laser light. Emission spectra are compared to thoseobtained from plasma driven by 1-$\mu$m-wavelength Nd:YAG laser light over arange of laser intensities spanning approximately $0.3-5 \times10^{11}$Wcm$^{-2}$, under otherwise identical conditions. Over this range ofdrive laser intensities, we find that similar spectra and underlying plasmacharge state distributions are obtained when keeping the ratio of 1-$\mu$m to2-$\mu$m laser intensities fixed at a value of 2.1(6), which is in goodagreement with RALEF-2D radiation-hydrodynamic simulations. Our experimentalfindings, supported by the simulations, indicate an approximately inverselyproportional scaling $\sim \lambda^{-1}$ of the relevant plasma electrondensity, and of the aforementioned required drive laser intensities, with drivelaser wavelength $\lambda$. This scaling also extends to the optical depth thatis captured in the observed changes in spectra over a range of dropletdiameters spanning 16-51$\mu$m at a constant laser intensity that maximizes theemission in a 2\% bandwidth around 13.5nm relative to the total spectralenergy, the bandwidth relevant for EUV lithography. The significant improvementof the spectral performance of the 2-$\mu$m- vs 1-$\mu$m driven plasma providesstrong motivation for the development of high-power, high-energy near-infraredlasers to enable the development of more efficient and powerful sources of EUVlight.

Characterization of 1- and 2-$\mu$m-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light