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Amorphous films of tantalum oxide (Ta2O5) are widely applied to build highlyreflective mirrors used in interferometric gravitational wave detectors, suchas the Laser Interferometer Gravitational Wave Observatory (LIGO). Despite alarge number of studies, the structural properties of amorphous Ta2O5 at thelocal scale still deserve several further investigations. Such information isessential to any attempt to understand the properties of this importantmaterial and no property modelling efforts can be expected to yield reliableinformation until the local structure in the amorphous phase is betterunderstood. In this paper we report the results obtained by analysing thesynchrotron X-ray pair distribution functions of pure and Ti-doped amorphousTa2O5 film, deposited by ion beam sputtering, as prepared and after a thermaltreatment. As a result, it is found that 1) the arrangement of Ta atoms inamorphous Ta2O5 strongly resembles that characterizing the high-pressureZ-Ta2O5 polymorph, whereas the topological properties of O atoms resembles thatobserved in delta-Ta2O5; 2) structural correlations in amorphous Ta2O5 start tovanish above ~ 5 Angstrom and are completely suppressed for r > 10 Angstrom onaccount of disorder; 3) Ti substitution retains the short-range topologicalordering characterizing the as prepared Ta2O5 amorphous film even after thermaltreatment; conversely, pure Ta2O5 films undergoes a significant rearrangementof the local structure after thermal treatment.

Deep insights into the local structure of amorphous Ta2O5 thin films by X-ray pair distribution function analysis