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Epitaxial perovskite oxide thin films and heterostructures are a highly active materials research topic generating both fundamental and applied interest. This manuscript reports the roles of oxidation kinetics and film deposition rate on the growth of phase-pure complex oxides by molecular-beam epitaxy, one of the premier techniques for these materials, in a regime that is traditionally described as being governed by thermodynamics. It is found that oxidation kinetics on the film surface are surprisingly important for the growth of PbTiO${}_{3}$ and for formulating a simple kinetic theory to interpret experimental observations. The results are also enlightening to predict the conditions for improved growth of BiFeO${}_{3}$ and other complex oxides by MBE, of high interest to the broad community studying oxide films and heterostructures.

Exploiting kinetics and thermodynamics to grow phase-pure complex oxides by molecular-beam epitaxy under continuous codeposition