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We cool the fundamental mode of a miniature cantilever by capacitivelycoupling it to a driven rf resonant circuit. Cooling results from the rfcapacitive force, which is phase shifted relative to the cantilever motion. Wedemonstrate the technique by cooling a 7 kHz cantilever from room temperatureto 45 K, obtaining reasonable agreement with a model for the cooling, damping,and frequency shift. Extending the method to higher frequencies in a cryogenicsystem could enable ground state cooling and may prove simpler than relatedoptical experiments in a low temperature apparatus.

Passive Cooling of a Micromechanical Oscillator with a Resonant Electric Circuit