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Based on experiments and 3-D simulations, we show that a soft elastic filmduring adhesion and debonding from a rigid flat surface undergoes morphologicaltransitions to pillars, labyrinths and cavities, all of which have the samelateral pattern length scale, close to \lambda/H ~ 3 for thick films, H > 1micrometer. The linear stability analysis and experiments show a new thin filmregime where \lambda/H \approx 3+ 2 (\gamma/3 \mu H)^(1/4) (\gamma is surfacetension, \mu is shear modulus) because of significant surface energy penalty(for example, \lambda/H = 6 for H = 200 nm; \mu = 1MPa).Comment: Accepted for publication in Phys. Rev. Let

Erratum: Contact Instability in Adhesion and Debonding of Thin Elastic Films [Phys. Rev. Lett.97, 018303 (2006)]