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The growth of diamondlike films and overlayers by the deposotion of energetic carbon atoms has been investigated by molecular-dynamics simulations. The interatomic many-atom potential suggested by Tersoff is used. The structurel analysis of the grown films shows that there is an energy window between 40 and 70 eV for the deposited atoms where the growth most closely results in dense diamondlike structure. This observation supports earlier experimental suggestions for optimal deposition conditions.Peer reviewe

Molecular-dynamics simulation of the growth of diamondlike films by energetic carbon-atom beams