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In a large scale trapped atomic ion quantum computer, high-fidelity two-qubitgates need to be extended over all qubits with individual control. We realizeand characterize high-fidelity two-qubit gates in a system with up to 4 ionsusing radial modes. The ions are individually addressed by two tightly focusedbeams steered using micro-electromechanical system (MEMS) mirrors. We deduce agate fidelity of 99.49(7)% in a two-ion chain and 99.30(6)% in a four-ion chainby applying a sequence of up to 21 two-qubit gates and measuring the finalstate fidelity. We characterize the residual errors and discuss methods tofurther improve the gate fidelity towards values that are compatible withfault-tolerant quantum computation.

High-fidelity Two-qubit Gates Using a MEMS-based Beam Steering System for Individual Qubit Addressing