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Dielectric laser acceleration is a versatile scheme to accelerate and controlelectrons with the help of femtosecond laser pulses in nanophotonic structures.We demonstrate here the generation of a train of electron pulses withindividual pulse durations as short as $270\pm80$ attoseconds(FWHM), measuredin an indirect fashion, based on two subsequent dielectric laser interactionregions connected by a free-space electron drift section, all on a singlephotonic chip. In the first interaction region (the modulator), an energymodulation is imprinted on the electron pulse. During free propagation, thisenergy modulation evolves into a charge density modulation, which we probe inthe second interaction region (the analyzer). These results will lead to newways of probing ultrafast dynamics in matter and are essential for futurelaser-based particle accelerators on a photonic chip.

Generation and Characterization of Attosecond Micro-Bunched Electron Pulse Trains via Dielectric Laser Acceleration