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We present Casimir force measurements in a sphere-plate configuration thatconsists of a high quality nanomembrane resonator and a millimeter sized goldcoated sphere. The nanomembrane is fabricated from stoichiometric siliconnitride metallized with gold. A Kelvin probe method is used in situ to imagethe surface potentials to minimize the distance-dependent residual force.Resonance-enhanced frequency-domain measurements of the nanomembrane motionallow for very high resolution measurements of the Casimir force gradient (downto a force gradient sensitivity of 3 uN/m). Using this technique, the Casimirforce in the range of 100 nm to 2 um is accurately measured. Experimental datathus obtained indicate that the device system in the measured range is bestdescribed with the Drude model.

Casimir Force and In Situ Surface Potential Measurements on Nanomembranes