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A comparison, based on numerical modeling, is made between the different forces experienced by nanoparticles present in a low pressure capacitively coupled parallel-plate silane (Si H4 ) discharge. We investigate in particular the influence of the thermophoretic force on the spatial distribution of the nanoparticle density profiles, due to a thermal gradient in gas temperature induced by heating or cooling of the electrodes. A series of simulations with a one-dimensional fluid model are performed with asymmetrical variation of the electrode temperatures. It appears that the resulting density profile of the nanoparticles experiences a significant shift towards the cooler electrode as soon as a temperature difference is applied. Thus thermophoresis is capable of influencing the force balance of suspended nanoparticles in the plasma, even at relatively small electrode temperature differences.

Role of the thermophoretic force on the transport of nanoparticles in dusty silane plasmas