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For low-pressure discharges, when the electron mean free path is larger orcomparable with the discharge length, the electron dynamics is essentiallynonlocal. Moreover, the electron energy distribution function (EEDF) deviatesconsiderably from a Maxwellian. Therefore, an accurate kinetic description ofthe low-pressure discharges requires knowledge of the nonlocal conductivityoperator and calculation of the nonMaxwellian EEDF. The previous treatmentsmade use of simplifying assumptions: a uniform density profile and a MaxwellianEEDF. In the present study a self-consistent system of equations for thekinetic description of nonlocal, nonuniform, nearly collisionless plasmas oflow-pressure discharges is derived. It consists of the nonlocal conductivityoperator and the averaged kinetic equation for calculation of the nonMaxwellianEEDF. The importance of accounting for the nonuniform plasma density profile onboth the current density profile and the EEDF is demonstrated.Comment: 19 pages, submitted to Phys. Rev.

physical review. e, statistical physics, plasmas, fluids, and related interdisciplinary topics

Self-consistent system of equations for a kinetic description of the low-pressure discharges accounting for the nonlocal and collisionless electron dynamics