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The diamagnetic susceptibility of a superconductor is directly related to itssuperfluid density. Mutual inductance is a highly sensitive method forcharacterizing thin films; however, in traditional mutual inductancemeasurements, the measured response is a non-trivial average over the area ofthe mutual inductance coils, which are typically of millimeter size. Here weimage localized, isolated features in the diamagnetic susceptibility of{\delta}-doped SrTiO3, the 2-DES at the interface between LaAlO3 and SrTiO3,and Nb superconducting thin film systems using scanning superconducting quantuminterference device susceptometry, with spatial resolution as fine as 0.7{\mu}m. We show that these features can be modeled as locally suppressedsuperfluid density, with a single parameter that characterizes the strength ofeach feature. This method provides a systematic means of finding andquantifying submicron defects in two-dimensional superconductors.

Observation of the signatures of sub-resolution defects in two-dimensional superconductors with scanning SQUID