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We investigate spin and optical properties of individual nitrogen-vacancycenters located within 1-10 nm from the diamond surface. We observe stabledefects with a characteristic optically detected magnetic resonance spectrumdown to lowest depth. We also find a small, but systematic spectral broadeningfor defects shallower than about 2 nm. This broadening is consistent with thepresence of a surface paramagnetic impurity layer [Tisler et al., ACS Nano 3,1959 (2009)] largely decoupled by motional averaging. The observation of stableand well-behaved defects very close to the surface is critical for single-spinsensors and devices requiring nanometer proximity to the target.

Spin Properties of Very Shallow Nitrogen Vacancy Defects in Diamond