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We use metastable NaCl-structure Ti0.5Al0.5N alloys to probe effects ofconfigurational disorder on adatom surface diffusion dynamics which controlphase stability and nanostructural evolution during film growth.First-principles calculations were employed to obtain potential energy maps ofTi and Al adsorption on an ordered TiN(001) reference surface and a disorderedTi0.5Al0.5N(001) solid-solution surface. The energetics of adatom migration onthese surfaces are determined and compared in order to isolate effects ofconfigurational disorder. The results show that alloy surface disorderdramatically reduces Ti adatom mobilities. Al adatoms, in sharp contrast,experience only small disorder-induced differences in migration dynamics.

Effects of configurational disorder on adatom mobilities on TiAlN(001) surfaces