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Noise measurements were performed to determine the quality factor ( Q) as a function of gas pressure P for microresonators in cantilever form with systematically modified surfaces. In the free-molecular regime, which is dominated by internal energy losses, Q was substantially decreased by more than an order of magnitude with increasing surface roughness. At higher pressures, within the molecular regime, Q showed the typical inverse linear dependence on pressure Q similar to P-1. However, in the molecular regime the Q factor also showed a strong dependence on surface morphology as indicated by surface area calculations using measured roughness data and compared to those obtained from Q similar to P-1 plots.

Influence of surface modification on the quality factor of microresonators