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(Received 20 September 2011; revised manuscript received 18 October 2011; published 17 January 2012)We show that for impacting argon clusters, both mean projected ranges of the constituents and depths ofradiation damage in diamond scale linearly with momentum. The same dependence was earlier found forkeV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, agood agreement for the value of displacement energy for the case of cluster impact is found by comparing thecalculated target sputtering and experimentally measured depth of radiation damage.DOI: 10.1103/PhysRevB.85.033405 PACS number(s): 61

Implantation of keV-energy argon clusters and radiation damage in diamond