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Taking advantage of vicinal (001) SrTiO3 substrates with different meanterrace widths, the heteroepitaxial growth of SrRuO3 in the step flow mode hasbeen mapped as a function of mean step velocity. Transition between stable andunstable step flow is shown to occur at a well-defined critical step velocity,with a step bunching instability observed below this threshold. The ability topass from unstable to stable step flow during growth upon increasing the meanstep velocity is demonstrated. This result is discussed in terms of astress-based driving force for step bunching in competition with an effectivestep-up adatom current.

Step velocity tuning of SrRuO3 step flow growth on SrTiO3