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A so far not considered energy loss mechanism in suspended micro- andnanoresonators due to noncontact acoustical energy loss is investigatedtheoretically. The mechanism consists on the conversion of the mechanicalenergy from the vibratory motion of the resonator into acoustic waves on largenearby structures, such as the substrate, due to the coupling between theresonator and those structures resulting from the Casimir force acting over theseparation gaps. Analytical expressions for the resulting quality factor Q forcantilever and bridge micro- and nanoresonators in close proximity to anunderlying substrate are derived and the relevance of the mechanism isinvestigated, demonstrating its importance when nanometric gaps are involved.

Energy loss mechanism for suspended micro- and nanoresonators due to the Casimir force