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The electrical conductivity behavior of highly crystallized undopedhydrogenated microcrystalline silicon films having different microstructureswas studied. The dark conductivity is seen to follow Meyer Neldel rule (MNR) insome films and anti MNR in others, depending on the details of microstructuralattributes and corresponding changes in the effective density of statesdistributions. A band tail transport and statistical shift of Fermi level areused to explain the origin of MNR as well as anti-MNR in our samples. Wepresent the evidence of anti-MNR in the various experimental transport data ofmicrocrystalline silicon materials reported in literature and analyze thesedata together with ours to show the consistency and physical plausibility ofstatistical shift model. The calculated MNR parameters and other significantmaterial parameters derived therefrom are tenable for a wide microstructuralrange of the microcrystalline silicon system.Comment: 10 pages, 4 figures, changed content and corrected typo

Influence of the statistical shift of Fermi level on the conductivity behavior in microcrystalline silicon