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We have studied the S=1/2 quasi-one-dimensional antiferromagnet TiOCl usingsingle crystal x-ray diffraction and inelastic x-ray scattering techniques. TheTi ions form staggered spin chains which dimerize below Tc1 = 66 K and have anincommensurate lattice distortion between Tc1 and Tc2 = 92 K. Based on ourmeasurements of the intensities, wave vectors, and harmonics of theincommensurate superlattice peaks, we construct a model for the incommensuratemodulation. The results are in good agreement with a soliton lattice model,though some quantitative discrepancies exist near Tc2. The behavior of thephonons has been studied using inelastic x-ray scattering with ~2 meV energyresolution. For the first time, a zone boundary phonon which softens at thespin-Peierls temperature Tsp has been observed. Our results show reasonablygood quantitative agreement with the Cross-Fisher theory for the phonondynamics at wave vectors near the zone boundary and temperatures near Tsp.However, not all aspects of the data can be described, such as the strongoverdamping of the soft mode above Tsp. Overall, our results show that TiOCl isa good realization of a spin-Peierls system, where the phonon softening allowsus to identify the transition temperature as Tsp=Tc2=92 K

X-ray Scattering Study of the spin-Peierls transition and soft phonon behavior in TiOCl