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We have examined whether the Co ions crystallographically substitute on theTi sites in rutile and anatase Ti_{1-x}$Co$_{x}$O$_{2-delta}$ thin films thatexhibit room-temperature ferromagnetism. Intensities of the x-ray Braggreflection from the films were measured around the $K$-absorption-edge of Co.If the Co ions randomly substitute on the Ti sites, the intensity shouldexhibit an anomaly due to the anomalous dispersion of the atomic scatteringfactor of Co. However, none of the anatase and rutile samples did exhibit ananomaly, unambiguously showing that the Co ions inTi$_{1-x}$Co$_{x}$O$_{2-delta}$ are not exactly located at the Ti sites ofTiO$_2$. The absence of the anomaly is probably caused by a significantdeformation of the local structure around Co due to the oxygen vacancy. We haveapplied the same method to paramagnetic Zn$_{1-x}$Co$_{x}$O thin films andobtained direct evidence that the Co ions are indeed substituted on the Znsites.

X-ray Anomalous Scattering of Diluted Magnetic Oxide Semiconductors: Possible Evidence of Lattice Deformation for High Temperature Ferromagnetism