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We investigate the influence of step edge diffusion (SED) and desorption onMolecular Beam Epitaxy (MBE) using kinetic Monte-Carlo simulations of thesolid-on-solid (SOS) model. Based on these investigations we propose twostrategies to optimize MBE growth. The strategies are applicable in differentgrowth regimes: During layer-by-layer growth one can exploit the presence ofdesorption in order to achieve smooth surfaces. By additional short high fluxpulses of particles one can increase the growth rate and assist layer-by-layergrowth. If, however, mounds are formed (non-layer-by-layer growth) the SED canbe used to control size and shape of the three-dimensional structures. Bycontrolled reduction of the flux with time we achieve a fast coarseningtogether with smooth step edges.Comment: 19 pages, 7 figures, submitted to Phys. Rev.

Unconventional MBE strategies from computer simulations for optimized growth conditions