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The structural and magnetic properties of Zn/Al doped nickel ferrite thinfilms can be adjusted by changing the Zn and Al content. The films areepitaxially grown by reactive magnetron sputtering using a triple clustersystem to sputter simultaneously from three different targets. Upon thevariation of the Zn content the films remain fully strained with similarstructural properties, while the magnetic properties are strongly affected. Thesaturation magnetization and coercivity as well as resonance position andlinewidth from ferromagnetic resonance (FMR) measurements are altered dependingon the Zn content in the material. The reason for these changes can beelucidated by investigation of the x-ray magnetic circular dichroism spectra togain site and valence specific information with elemental specificity.Additionally, from a detailed investigation by broadband FMR a minimum ing-factor and linewidth could be found as a function of film thickness.Furthermore, the results from a variation of the Al content using the same setof measurement techniques is given. Other than for Zn, the variation of Alaffects the strain and even more pronounced changes to the magnetic propertiesare apparent.

Control of site occupancy by variation of the Zn and Al content in NiZnAl ferrite epitaxial films with low magnetic damping