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Entropy effects substantially modify the growth of self-assembled Genanostructures on vicinal Si (001) surfaces. As shown by variable temperaturescanning tunneling microscopy, this leads to new types of one dimensionalnanostructures that are not only tunable in size and shape but can be fullyreversible erased and reformed without changes in final sizes and shapes. Thisunique behavior is caused by the free surface energy renormalization caused bythe large step entropy of vicinal surfaces. In thermodynamic equilibrium, thisfavors the formation of a planar 2D surface at higher temperatures, where-asthe nanostructured surface is the preferred low-temperature configuration.Taking the step entropy into account, the critical phase transition temperatureis derived by free energy calculations and is shown to scale nearly linearlywith the Ge coverage, in excellent agreement with the experiments. Due toself-limitation, the nanowire size is solely controlled by the Ge coverage andvicinal angle, completely independent of the growth or an-nealing conditions.Thus, highly reproducible nanostructures with tunable geometries are obtained.This opens new avenues for controlled nanostructure formation for practicalde-vice applications.

Entropy controlled fully reversible nanostructure formation of Ge on miscut vicinal Si (001) surfaces