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Spin-photon coupling presents an enticing opportunity for the long-rangecoupling of spin qubits. The spin-photon coupling rate $g_{s}$ is proportionalto the charge-photon coupling rate $g_{c}$. To move deeper into the strongcoupling regime, $g_{c}$ can be enhanced by fabricating high-impedance cavitiesusing high kinetic inductance films. Here we report dc transport and microwaveresponse investigations of niobium nitride (NbN) films of differentthicknesses. The kinetic inductance increases rapidly as the film thickness isreduced below 50 nm and for 15 nm NbN films we measure a sheet kineticinductance $L_{k,S}$ = 41.2 pH/$\Box$. As an application of the high kineticinductance films, we fabricate compact LC filters that are commonly used toreduce microwave leakage in circuit quantum electrodynamics (cQED) devices.These filters feature up to 60 dB of attenuation near typical cavity resonancefrequencies $f_c$ = 8 GHz.

Developing high-impedance superconducting resonators and on-chip filters for semiconductor quantum dot circuit quantum electrodynamics