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The ability to execute high-fidelity operations is crucial to scaling upquantum devices to large numbers of qubits. However, signal distortionsoriginating from non-linear components in the control lines can limit theperformance of single-qubit gates. In this work, we use a measurement based onerror amplification to characterize and correct the small single-qubit rotationerrors originating from the non-linear scaling of the qubit drive rate with theamplitude of the programmed pulse. With our hardware, and for a 15-ns pulse,the rotation angles deviate by up to several degrees from a linear model. Usingpurity benchmarking, we find that control errors reach $2\times 10^{-4}$, whichaccounts for half of the total gate error. Using cross-entropy benchmarking, wedemonstrate arbitrary-angle single-qubit gates with coherence-limited errors of$2\times 10^{-4}$ and leakage below $6\times 10^{-5}$. While the exactmagnitude of these errors is specific to our setup, the presented method isapplicable to any source of non-linearity. Our work shows that thenon-linearity of qubit drive line components imposes a limit on the fidelity ofsingle-qubit gates, independent of improvements in coherence times, circuitdesign, or leakage mitigation when not corrected for.

Calibration of Drive Non-Linearity for Arbitrary-Angle Single-Qubit Gates Using Error Amplification