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Acoustic devices play an important role in classical information processing.The slower speed and lower losses of mechanical waves enable compact andefficient elements for delaying, filtering, and storing of electric signals atradio and microwave frequencies. Discovering ways of better controlling thepropagation of phonons on a chip is an important step towards enabling largerscale phononic circuits and systems. We present a platform, inspired by decadesof advances in integrated photonics, that utilizes the strong piezoelectriceffect in a thin film of lithium niobate on sapphire to excite guided acousticwaves immune from leakage into the bulk due to the phononic analogue ofindex-guiding. We demonstrate an efficient transducer matched to 50 ohm andguiding within a 1-micron wide mechanical waveguide as key building blocks ofthis platform. Putting these components together, we realize acoustic delaylines, racetrack resonators, and meander line waveguides for sensingapplications. To evaluate the promise of this platform for emerging quantumtechnologies, we characterize losses at low temperature and measure qualityfactors on the order of 50,000 at 4 kelvin. Finally, we demonstrate phononicfour-wave mixing in these circuits and measure the nonlinear coefficients toprovide estimates of the power needed for relevant parametric processes.

Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire