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Development of broadband thermal sensors for the detection of, among others,radiation, single nanoparticles, or single molecules is of great interest. Inrecent years, photothermal spectroscopy based on the shift of the resonancefrequency of stressed nanomechanical resonators has been successfullydemonstrated. Here, we show the application of soft-clamped phononic crystalmembranes made of silicon nitride as thermal sensors. It is experimentallydemonstrated how a quasi-bandgap remains even at very low tensile stress, inagreement with finite element method simulations. An increase of the relativeresponsivity of the fundamental defect mode is found when compared to that ofuniform square membranes of equal size, with enhancement factors as large as anorder of magnitude. We then show phononic crystals engineered insidenanomechanical trampolines, which results in additional reduction of thetensile stress and increased thermal isolation, resulting in furtherenhancement of the responsivity. Finally, defect mode and bandgap tuning isshown by laser heating of the defect to the point where the fundamental defectmode completely leaves the bandgap.

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Thermal transport and frequency response of localized modes on  low-stress nanomechanical silicon nitride drums featuring a phononic bandgap  structure