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A strong trend for quantum based technologies and applications follows theavenue of combining different platforms to exploit their complementarytechnological and functional advantages. Micro and nano-mechanical devices areparticularly suitable for hybrid integration due to the easiness of fabricationat multi-scales and their pervasive coupling with electrons and photons. Here,we report on a nanomechanical technological platform where a silicon chip iscombined with an aluminum nitride layer. Exploiting the AlN piezoelectricity,Surface Acoustic Waves are injected in the Si layer where the material has beenlocaly patterned and etched to form a suspended nanostring. Characterizing thenanostring vertical displacement induced by the SAW, we found an externalexcitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency.Exploiting the long term expertise in silicon photonic and electronic devicesas well as the SAW robustness and versatility, our technological platformrepresents a strong candidate for hybrid quantum systems.

High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers