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We analyze the evolution of the normal and superconducting electronicproperties in epitaxial TiN films, characterized by high Ioffe-Regel parametervalues, as a function of the film thickness. As the film thickness decreases,we observe an increase of in the residual resistivity, which becomes dominatedby diffusive surface scattering for $d\leq20\,$nm. At the same time, asubstantial thickness-dependent reduction of the superconducting criticaltemperature is observed compared to the bulk TiN value. In such a high qualitymaterial films, this effect can be explained by a weak magnetic disorderresiding in the surface layer with a characteristic magnetic defect density of$\sim10^{12}\,\mathrm{cm}^{-2}$. Our results suggest that surface magneticdisorder is generally present in oxidized TiN films.

Superconductivity behavior in epitaxial TiN films points at surface magnetic disorder