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Scanning nanoscale superconducting quantum interference devices (SQUIDs) aregaining interest as highly sensitive microscopic magnetic and thermalcharacterization tools of quantum and topological states of matter and devices.Here we introduce a novel technique of collimated differential-pressuremagnetron sputtering for versatile self aligned fabrication of SQUID on tip(SOT) nanodevices, which cannot be produced by conventional sputtering methodsdue to their diffusive, rather than the required directional point-source,deposition. The new technique provides access to a broad range ofsuperconducting materials and alloys beyond the elemental superconductorsemployed in the existing thermal deposition methods, opening the route togreatly enhanced SOT characteristics and functionalities. Utilizing thismethod, we have developed MoRe SOT devices with sub-50 nm diameter, magneticflux sensitivity of 1.2 $\mu\Phi_0/Hz^{1/2}$ up to 3 T at 4.2 K, and thermalsensitivity better than 4 $\mu K/Hz^{1/2}$ up to 5 T, about five times higherthan any previous report, paving the way to nanoscale imaging of magnetic andspintronic phenomena and of dissipation mechanisms in previously inaccessiblequantum states of matter.

Sputtered MoRe SQUID-on-tip for high-field magnetic and thermal nanoimaging