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Realizing an NbN superconducting nanowire single-photon detector (SNSPD) witha 100% intrinsic detection efficiency (IDE) at the near-infrared wavelengths isstill challenging. Herein, we developed a post-processing method to increasethe IDE of NbN SNSPDs to near unity using a 20 keV helium ion irradiation. TheIDE enhancement was achieved owing to the ion-induced reduction of thesuperconducting energy gap and the electron density of states at the Fermilevel, determined with the electrical and magnetic transport measurements. Thechange in optical absorptance of the irradiated SNSPD was negligible asconfirmed by the measured optical reflectance and system detection efficiency(SDE). Benefited with the IDE enhancement, the SDE of an irradiated device wassignificantly increased from 49% to 92% at 2.2 K for a 1550 nm wavelength.

Enhancing intrinsic detection efficiency of superconducting nanowire single-photon detectors via helium ion irradiation