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Schemes to achieve strong coupling between mechanical modes of aluminumnitride microstructures and microwave cavity modes due to the piezoelectriceffect are proposed. We show that the strong coupling regime is feasible for anon-chip aluminum nitride device that is either enclosed by a three-dimensionalmicrowave cavity or integrated with a superconducting coplanar resonator.Combining with optomechanics, the piezomechanical strong coupling permitscoherent conversion between microwave and optical modes with high efficiency.Hence, the piezomechanical system will be an efficient transducer forapplications in hybrid quantum systems.

Cavity piezomechanical strong coupling and frequency conversion on an aluminum nitride chip