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We study the evolution of quiescent galaxies at 0.5<z<2.5 as a function ofstellar mass, using very deep NIR imaging data taken with the Multi-ObjectInfrared Camera and Spectrograph on the Subaru Telescope in the GOODS-Northregion. The deep NIR data allow us to construct a stellar mass-limited sampleof quiescent galaxies down to ~10^{10} Msun even at z~2 for the first time. Weselected quiescent galaxies with age/tau>6 by performing SED fitting of themulti broad-band photometry from the U to Spitzer 5.8um bands with thepopulation synthesis model of Bruzual & Charlot (2003) where exponentiallydecaying star formation histories are assumed. The number density of quiescentgalaxies increases by a factor of ~3 from 1.0<z<1.5 to 0.5<z<1.0, and by afactor of ~10 from 1.5<z<2.5 to 0.5<z<1.0, while that of star-forming galaxieswith age/tau<4 increases only by factors of ~2 and ~3 in the same redshiftranges. At 0.5<z<2.5, the low-mass slope of the stellar mass function ofquiescent galaxies is alpha ~ 0 -- 0.6, which is significantly flatter thanthose of star-forming galaxies (alpha ~ -1.3 -- -1.5). As a result, thefraction of quiescent galaxies in the overall galaxy population increases withstellar mass in the redshift range. The fraction of quiescent galaxies at10^{11}-10^{11.5} Msun increases from ~20-30% at z~2 to ~40-60% at z~0.75,while that at 10^{10}-10^{10.5} Msun increases from <~ 5% to ~15% in the sameredshift range. These results could suggest that the quenching of starformation had been more effective in more massive galaxies at 1<~z<~2. Such amass-dependent quenching could explain the rapid increase of the number densityof ~M* galaxies relative to lower-mass galaxies at z >~ 1-1.5.

MOIRCS Deep Survey. X. Evolution of Quiescent Galaxies as a Function of Stellar Mass at 0.5