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Laser offers ability of performing surface processing and synthesis of nanomaterials at the same time, so called “two birds with one stone”, which is beneficial for a large variety of practical applications. Prof. Sugioka’s team aims at research and development of extreme manufacturing techniques based on lasers which can realize low environmental load, high quality, high efficiency fabrication of materials using ultrafast lasers such as femtosecond and picosecond lasers. The developed techniques include three-dimensional (3D) micro/nanofabrication, hierarchical micro/nanostructuring, high aspect ratio machining, and synthesis of new materials. In this paper, a new processing technique termed underwater persistent bubble assisted femtosecond laser ablation in liquids (UPB-fs-LAL) is presented, which can produce concentric circular macrostructures with millimeter-scale tails on silicon substrates. Long-tailed macrostructures are composed of layered fan-shaped (central angles of 45°–141°) hierarchical micro/nanostructures, which are produced by fan-shaped beams refracted at the mobile bubble interface (≥50° light tilt, referred to as the vertical incident direction) during UPB-fs-LAL with a line-by-line scanning scheme. Centric circular macrostructures contain low/high/ultrahigh spatial frequency laser-induced periodic surface structures (LSFLs/HSFLs/UHSFLs) with periods of 550–900, 100–200, 40–100 nm, which are produced by fs-LAL with the aid of stationary bubbles in water. A period of 40 nm, less than 1/25th of the laser wavelength (1030 nm), is the finest laser-induced periodic surface structures (LIPSS) among ever created on silicon. This research opens up new possibilities for laser materials processing, since it enables template-free cost-effective laser structuring of arrays of hierarchical micro/nanostructures. Such bubble-based laser processing may further increase versatility of the laser processing.

Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring