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The inelastic electron scattering cross-section spectra of Si, Fe and iron silicides FeSi 2 , Fe 5 Si 3  were calculated from the experimental reflected electron energy loss spectra as the product of the average inelastic mean free path and the differential cross section of the inelastic electron scattering. The inelastic electron scattering cross-section spectra were studied using factor analysis. This method allowed us to quantitatively separate the surface and volume contributions to the spectra, and determine the energy of the bulk plasmon more accurately than it is possible using traditional methods.

Factor analysis of inelastic electron scattering cross section spectra of Si, Fe and iron silicides FeSi2, Fe5Si3