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Superconducting Nb3Sn films can be synthesized by controlling the atomicconcentration of Sn. Multilayer sequential sputtering of Nb and Sn thin filmsfollowed by high temperature annealing is considered as a method to fabricateNb3Sn films, where the Sn composition of the deposited films can be controlledby the thickness of alternating Nb and Sn layers. We report on the structural,morphological and superconducting properties of Nb3Sn films fabricated bymultilayer sequential sputtering of Nb and Sn films on sapphire substratesfollowed by annealing at 950 {\deg}C for 3 h. We have investigated the effectof Nb and Sn layer thickness and Nb:Sn ratio on the properties of the Nb3Snfilms. The crystal structure, surface morphology, surface topography, and filmcomposition were characterized by X-ray diffraction (XRD), scanning electronmicroscopy (SEM), atomic force microscopy (AFM), and energy dispersive X-rayspectroscopy (EDS). The results showed Sn loss from the surface due toevaporation during annealing. Superconducting Nb3Sn films of criticaltemperature up to 17.93 K were fabricated.

iop conference series. materials science and engineering

Effect of layer thickness on structural, morphological and  superconducting properties of Nb$_3$Sn films fabricated by multilayer  sequential sputtering