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In microelectronics manufacturing industry, to obtain the high-acceleration of Marco-micro movement platform was very crucial and difficult. In this paper, a new macromicro-macro movement platform is described. In addition, by the analysis of its driving principle, nine simplified dynamic models and dynamic equations under different motion conditions are established respectively. In different driving modes (single VCM driving mode, double VCMs reverse driving mode and double VCMs same driving mode, respectively), the displacement and velocity of floating stator, macro system and micro system was calculated, respectively. These results imply that the macro-micro-macro movement platform takes a periodic reciprocating motion and the max displacement and velocity of floating stator, macro system and micro system make different change rules, respectively. It concluded that the floating stator effectively isolating the vibration of macro-micro-macro movement platform.

Dynamic modelling and analysis of super-high acceleration macro-micro-macro movement platform