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This paper describes the main principles of constructing innovative MEMS flow meters for gaseous working fluids. MEMS flow meter contains hot-wire thermoanemometrisc sensor which response to the temperature change caused by convective working fluid heat transfer from a hot-wire. The advantages of using hot-wire thermoanemometric sensors were analyzed. The main emphasis of this work is on speed, construction simplicity and small size of the sensor. The new approach to the solution of a problem of sensor output signal relation with the working fluid temperature is presented. This approach is based on adding an extra temperature sensor and a special scheme for thermal compensation to the hot-wire sensor. The temperature scale between temperature sensors (thermistors) corresponds to the flow speed and the flow rate.

Thermal MEMS flow meter for gaseous working fluids on the basis of the hot-wire thermoanemometric sensor